Etch, CD-SEM and Defect Inspection Systems

• Dry Etch Systems
  • Conductor Etch Systems
  • Non-Volatile Materials Etch System
  • Magnetic Head Etch System
  • Production Support Program
• CD-SEM & Defect Inspection
  • CD-SEM
  • Design Based Metrology System
  • Defect Review SEM
  • Wafer Surface Inspection System

Field Solutions

• Uniformized Electric Field Wafer Holder
• HDD capacity increasing and Mirroring modification
• FAPC(Linux)FAPC(Linux) upgrade
• Data Station for CD-SEM
• Terminal PC

Index by device

Offline Analysis

• Field Emission Scanning Electron Microscopes (FE-SEM)
• Transmission Electron Microscopes (TEM)
• Pre-processing of Sample for TEM/SEM
• Nano-Probing Systems
• Atomic Force Microscopes (Global site)

ICT Solutions

• Big Data Solutions

Industrial Solutions

• Industrial Robot

Automotive Sensor & Control Devices (Global site)

Industrial Materials (Global site)

Electronic Components

• Diodes
• High Voltage IC
• IGBT
• Capacitor
• Hitachi Magnetrons
• Electronic Devices